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شبیه سازی و مطالعه ی اثر دمای چشمه در لایه نشانی نانو فیلم های طلا به روش تبخیر حرارتی با استفاده از نرم افزار COMSOL Multiphysics | ||
فیزیک کاربردی ایران | ||
مقاله 1، دوره 6، شماره 1، خرداد 1395، صفحه 5-26 اصل مقاله (1.52 M) | ||
نوع مقاله: مقاله پژوهشی | ||
شناسه دیجیتال (DOI): 10.22051/jap.2018.7505.1013 | ||
نویسندگان | ||
محمد حسین احسانی* 1؛ مجمود جلالی مهر آباد2؛ عباس جوادیان3 | ||
1هیات علمی | ||
2کارشناس | ||
3هیات علمی دانشگاه سمنان | ||
چکیده | ||
در این مقاله، فرآیند لایه نشانی فیلم های نازک طلا، به کمک روش تبخیر حرارتی شبیه سازی شد. برای این منظور از نرم افزار COMSOL Multiphysics استفاده گردید. مدل سه بعدی در محیط نرم افزار ایجاد شده و هندسه، تحلیل مش ها، شرایط مرزی و روابط مورد نیاز معرفی و مورد مطالعه قرار گرفتند. ضخامت، چگالی، شار گرما، فشار و سایر پارامتر های مرتبط با لایه نشانی مورد بررسی قرار گرفتند. با استفاده از رگرسیون صفحه ای، معادله ی سطوح نانو فیلم های طلا محاسبه و اثر دمای چشمه بر رشد فیلم های نازک طلا بررسی گردید. نتایج نشان داد که بین ضخامت فیلم نازک و دمای چشمه رابطه ی مستقیم وجود دارد. با استفاده از برازش غیر خطی مدلی برای وابستگی ضخامت فیلم نازک به دمای چشمه ارائه گردید. با مقایسه نتایج بدست آمده از شبیه سازی ها در این کار برای ضخامت و انحنای سطح فیلم های نازک طلا با رفتار مورد انتظار از توزیع جرم روی زیرلایه، تطابق بین مقادیر شبیه سازی شده و این رفتار مشاهده گردید. | ||
کلیدواژهها | ||
تبخیر حرارتی؛ فیلم نازک؛ شبیه سازی | ||
عنوان مقاله [English] | ||
Simulation and Study of Source temperature effect in gold thin films growth prepared via evaporation method using COMSOL Multiphysics | ||
نویسندگان [English] | ||
Mohammadhossein Ehsani1؛ Mahmod Jalali Mehrabad2؛ Abbas Javadian3 | ||
1semnan | ||
3Semnan | ||
چکیده [English] | ||
In the present work, gold thin films growth process using the evaporation method has been simulated. For this purpose, the COMSOL Multiphysics 5.0 simulator software was used. Three-dimensional models were constructed and geometry, mesh analysis, boundary conditions and related relations were defined and studied. Film thickness, density, heat flux and other related parameter to deposition were investigated. Using planar regression, surface equation of the gold thin films was calculated and the effect of the temperature of gold source on thickness of films was investigated. Results showed that there is a correlation between the temperature of source and the thickness of gold films. Using non-linear regression, a model was represented in order to describe the dependency of film thickness on source temperature. Comparing the simulation results in this paper for thickness and curvature of gold thin films with expected behavior distribution on substrate, a promising accommodation between the simulated data and this trend was observed. | ||
کلیدواژهها [English] | ||
Evaporation, Thin film, Simulation | ||
مراجع | ||
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